The LatticeAx is more accurate than manual cleaving and less costly and faster than complex automated machines. It is synergistic with other tools in the lab changing the sample preparation workflow and reduces the time to prepare cross sections.
Recent News: New LatticeAx 300 Installations in Germany and Oregon ▶
Every user can cleave samples with wide variation of size, thickness and materials at high quality within 2-min.
The LatticeAx 220 is LatticeGear’s cleaving workhorse delivering 20-μm cleaving accuracy.within 5-min
LatticeAx300 is LatticeGear’s highest performance cleaving solution. It integrates vision package with 5-μm optical resolution and precise control of all axis to cleave with 10-um accuracy in <5-min.
The LatticeAx was used to cleave a specific site on the sample without the luxury of features that are aligned perpendicular to the sample’s leading edge. Although the silicon is <100> the pattern shown is rotated 45 degrees. This makes it more challenging to target features. A process was developed to target the area of interest and cleave.
Cross sections of photoresist are critical in understanding a lithographic process. The LatticeAx was used to cleanly cleave photoresist. The sample was cleaved and then coated with a conductive film and examined in an SEM.
A multi-tool process was used to prepare cross sections of copper bumps. The LatticeAx was used to cleave close to a specific row of copper bumps for quick, final broad argon ion beam milling.
Cross section of SEMATECH 5x50 micron TSVs. A single tool (LatticeAx) process was used to simply cleave through the etched vias and the image in the SEM without any other preparation.
In 2-min, straight, clean, high quality cross-section surfaces.
“…Like having a piece of wafer too wide to fit in the SEM. Before we would grind the sample to size rather than risk cleaving off a sliver. And grinding takes time, contaminates the sample, and oxidizes the sample face…”
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